Zygo
Z3D-7000
What it is
The Zygo Z3D-7000 is a non-contacting, non-destructive optical metrology system designed for production wafers. The system accommodates 200 mm and 300 mm wafer sizes and can be configured as a bridge tool to handle both sizes simultaneously. Wafers are loaded via FOUPs and/or open cassettes. The Z3D-7000 incorporates Zygo's fifth-generation interferometric technology and is ISO Class 2, S2/S8, and CE certified with SEMI E95 compliant software. The system uses modular IntelliSensors to reduce mean time between repairs.[1][2]
How it works
The Z3D-7000 uses a high-precision stage and Zygo's 'OneShot' processing algorithms to simultaneously measure multiple parameters including film thickness, critical dimensions, overlay, trench depth, and general surface topography. The system's 'TopSlice' and 'FilmSlice' analysis capabilities isolate the top surface topography of multilayer films and can calculate film thickness maps. The long scan range and encoder technology on the z-axis enable measurement of wafer curvature for film stress tracking. The measurement data shows high correlation with contact techniques such as atomic force microscopes and stylus profilers.[1][2]
What can it run?
Process applications and technology nodes documented for this tool.
- Process control
- Photolithography
- Etch
- Bumping processes
- Transistor formation
- Interconnect
- Film thickness measurement
- Critical dimensions measurement
- Overlay measurement
- Laser scribe measurement
- Wafer curvature measurement
- Film stress tracking
What do the numbers mean?
Wafer handling5
Optics & imaging1
Performance3
Control & software4
- Key features
- High speed non-contacting metrology; simultaneously measures multiple parameters; ISO Class 2, S2/S8, and CE certified; SEMI E95 compliant software; modular IntelliSensors reduce MTBR[1]
Configuration & options5
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the Z3D-7000 support?
The Z3D-7000 accommodates 200 mm and 300 mm wafers and can be configured as a bridge tool to handle both sizes simultaneously.[1][2]
What software does the Z3D-7000 use?
The system uses MetroPro software, which provides a suite of measurement, control, data analysis, and processing options including 2D and 3D plots, reports, and statistics.[1][2]
What certifications or standards does the Z3D-7000 comply with?
The system is ISO Class 2, S2/S8, and CE certified, and its software is SEMI E95 compliant.[1][2]
How does the Z3D-7000 compare to contact metrology tools?
The Z3D-7000 achieves throughput that exceeds contact technologies such as profilers or atomic force microscopes by as much as a factor of 10, while maintaining high correlation with those measurement techniques.[1]
Not publicly documented
The following facts about the Z3D-7000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Z3D-7000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Z3D-7000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Z3D-7000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Z3D-7000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Z3D-7000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]Z3D-7000 — Zygo | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 5, 2026.
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