Comparison ledger
Filmetrics R50, Zygo Z3D-7000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | R50Filmetrics | Z3D-7000Zygo |
|---|---|---|
| OEM | Filmetrics | Zygo |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | 5th generation |
| Family | Filmetrics R50 | Zygo Z3D-7000 |
| Specifications | ||
| Default configuration | configured by default for metallic layers[1] | — |
| Default sample thickness | 525 um +/- 25 um[1] | — |
| Equipment section | Metrology[1] | — |
| Related equipment on same page group | AIT CMT-SR2000N 4-Point Probe Measurement System; MPI TS150 Probe Station[1] | — |
| Measurement type | 4-point probe[1] | Non-contacting, non-destructive optical metrology[2] |
| Default material | metallic layers[1] | — |
| Wafer sizes | — | 200 mm and 300 mm wafers[2] |
| Bridge-tool configuration | — | Can be configured to simultaneously handle both wafer sizes[2] |
| Key features | — | High speed non-contacting metrology; simultaneously measures multiple parameters; ISO Class 2, S2/S8, and CE certified; SEMI E95 compliant software; modular IntelliSensors reduce MTBR[2] |
| Technology | — | ZYGO's fifth generation interferometric technology[2] |
| Software | — | MetroPro software[2] |
| Loaded wafers | — | FOUPS and/or open cassettes[2] |
| Throughput | — | Exceeds throughput of contact technologies (profilers, atomic force microscopes) by a factor of 10[2] |
| Simultaneous measurements | — | Film thickness, critical dimensions, overlay, trench depth, and general surface topography[2] |
| Precision | — | Sub-nanometer precision for critical etch depth processes[2] |
| Wafer loading | — | FOUPS and/or open cassettes, pre-alignment, super flat chuck[2] |
| Certifications | — | ISO Class 2, S2/S8, CE certified[2] |
| Software compliance | — | SEMI E95 compliant[2] |
| Modular sensors | — | IntelliSensors reduce MTBR[2] |
| Algorithms | — | OneShot, TopSlice, FilmSlice[2] |
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