Tegal
900
The Tegal 900 is a plasma etch system. The Tegal 900 is used for integrated circuits and related microelectronics devices. The Tegal 900 supports wafer sizes from 3 inches to 150 mm.[1][2][3]
What it is
The 900 Series is a plasma etcher suitable for etching a variety of films used in the manufacture of semiconductors, telecommunications and optoelectronic devices, flat panel displays, and thin film magnetic heads. The system is capable of handling both round and square substrates.[2]
How it works
The 900 Series may be upgraded with an Advanced Control System (ACS), which replaces aging microcontroller boards with a PC-based control system. The ACS upgrade provides a graphical user interface and features such as micro-step servo motor controllers, programmable logic controllers, recipe storage, data logging, SECS/GEM II factory automation, and user security levels.[1]
Where it fits in the process flow
The system is used for specific etch steps such as defreckling and backside nitride etching in the production of advanced signal processing devices. The 900 Series is employed in both production and research and development environments.[2]
Applications
The Tegal 900 Series is used for etching films in the production of semiconductors, telecommunications and optoelectronic devices, flat panel displays, and thin film magnetic heads. The system is adept at handling both round and square substrates, delivering reliable, repeatable results.[2]
- defreckling
- backside nitride etching
- processing III-V materials such as gallium arsenide (GaAs)
- high-speed broadband networks
- wireless telecommunications
- linear, mixed-signal and digital integrated circuits
What do the numbers mean?
Wafer handling4
Configuration & options5
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 901 ACS | — | — | Advanced Control System upgrade with a Windows XP graphical user interface, pre-built SST table with upgrade electronics and LCD touchscreen monitor pre-installed, micro-step servo motor controllers, high-precision programmable logic controllers, recipe storage, onboard data logging, SECS/GEM II support, and seven levels of user security. | web.archive.org[1] |
| 901g | — | — | Referenced as one of the table-top cassette-to-cassette etch systems eligible for the ACS upgrade. | web.archive.org[1] |
| 903e | — | — | Referenced as one of the table-top cassette-to-cassette etch systems eligible for the ACS upgrade. | web.archive.org[1] |
| 901e | — | — | Referenced as one of the table-top cassette-to-cassette etch systems eligible for the ACS upgrade. | web.archive.org[1] |
| 900 ACS | — | — | latest generation referenced in the source; includes pre-built SST table with upgrade electronics and LCD touchscreen monitor pre-installed, micro-step servo motor controllers, high-precision programmable logic controllers, virtually unlimited recipe storage, onboard data logging, SECS/GEM II support, and seven levels of user security | web.archive.org[1] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the Tegal 900 support?
The Tegal 900 supports wafer sizes of 3 inches, 100mm, and 150mm.[1]
Does the Tegal 900 handle round and square substrates?
Yes, the 900 Series is adept at handling both round and square substrates.[2]
What types of films can the Tegal 900 etch?
The 900 Series can etch a variety of films used in the manufacture of semiconductors, telecommunications and optoelectronic devices, flat panel displays, and thin film magnetic heads.[2]
What applications is the Tegal 900 used for?
The 900 Series is used for applications such as defreckling and backside nitride etching, as well as processing III-V materials like gallium arsenide for HBT devices.[2][3]
Can the Tegal 900 be upgraded?
Yes, the 900 Series can be upgraded with the Advanced Control System (ACS), which provides a PC-based control with a graphical user interface and various process and automation features.[1]
Not publicly documented
The following facts about the 900 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 900 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 900 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 900 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 900 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 900 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]web.archive.org — web.archive.orgweb.archive.org
Last updated Oct 5, 2026.
Compare with similar tools
View all →
The Tegal 6510 is a high-density CCP plasma etch tool with dual-frequency RF power application and magnetic plasma confinement.
The Tegal 6520 is a high-density CCP plasma etch tool with dual-frequency RF power application and magnetic plasma confinement.
The Tegal 6540 is a high-density plasma etch system used for etching difficult-to-etch materials in MEMS and related semiconductor applications.
The Tegal 6550 is a plasma etch reactor/system for etching non-volatile metal and metal oxide films, with a dual-chamber platform and patented rinse-strip-rinse capability.