Tegal
1511e
The Tegal 1511e is a tri-electrode dual-frequency plasma etch tool. The Tegal 1511e processes three- to six-inch wafers and was first sold in 1984. The Tegal 1511e was Tegal's first vacuum-loadlocked dual-frequency tri-electrode etch system.[1]
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- semiconductors
- telecommunications devices
- optoelectronic devices
- high-performance wireless and data applications
What do the numbers mean?
Vacuum & pumping2
Wafer handling1
Configuration & options2
Vintage & configurations
- 1984Production start[1]
First sold in 1984.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the Tegal 1511e support?
What type of etch system is the Tegal 1511e?
The Tegal 1511e is a tri-electrode dual-frequency plasma etch system.[1][2]
What applications is the Tegal 1511e used for?
The Tegal 1511e is used for etching films in semiconductor, telecommunications, and optoelectronic device manufacturing, including high-performance wireless and data applications.[1]
Not publicly documented
The following facts about the 1511e are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the 1511e are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 1511e are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 1511e are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 1511e is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 1511e are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]1511e — Tegal | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Sep 22, 2026.
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