Waferpedia

Branson

IPC 2000 / 3000

Branson IPC 2000 / 3000 family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Branson IPC 2000 / 3000 is a manual plasma processing system. The Branson IPC 2000 / 3000 is used for plasma ashing, descum, dry cleaning, surface treatment, and plasma etching. The Branson IPC 2000 / 3000 supports small samples up to 8 inch wafers depending on model and chamber configuration.[1]

BransonIPC 2000 / 3000
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Power

Configuration dependent[1]

Gas delivery

Configuration dependent[1]

What it is

The Branson IPC 2000 / 3000 is a manual RF plasma processing platform used for photoresist ashing, plasma descum, dry cleaning, surface treatment, and plasma etching in semiconductor and related industries.[1]

The system belongs to a family that includes the 2000, 3000, and 4000 series and is available in desktop or stand-alone configurations depending on the model and chamber type.[1]

How it works

The Branson IPC 2000 / 3000 operates by the operator manually loading samples or wafers into the chamber, followed by chamber evacuation, introduction of process gas, and generation of RF power to create plasma. The process runs under controlled pressure, gas flow, and time.[1]

What do the numbers mean?

Power & electrical1

RF power
Configuration dependent[1]
Accurate?

Wafer handling2

Wafer / sample size
Small samples up to 8 inch wafers depending on model and chamber configuration[1]
Accurate?
Wafer quantity per run
Configuration dependent[1]
Accurate?

Gas & chemistry1

Gas lines
Configuration dependent[1]
Accurate?

Control & software2

Operation
Automatic, semi-automatic, or manual depending on controller configuration[1]
Accurate?
PC controller upgrade option
Available for selected working systems, subject to evaluation[1]
Accurate?

Configuration & options9

Refurbished[2]
Accurate?
Manufacturer
Branson[2]
Accurate?
Model
IPC 2000 / 3000[2]
Accurate?
Equipment family
Branson/IPC 2000, 3000, and 4000 Series manual plasma systems[1]
Accurate?
Desktop or stand-alone, depending on exact model[1]
Accurate?
Loading
Manual load / unload[1]
Accurate?
Process type
Plasma ashing, descum, dry cleaning, surface treatment, or plasma etching depending on configuration[1]
Accurate?
Chamber type
Quartz chamber for ashing / descum or metal chamber for etching depending on model[1]
Accurate?
Model family
IPC 2000 / 3000 family[3]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • RF powerConfiguration dependent[1]
  • Gas linesConfiguration dependent[1]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the IPC 2000 / 3000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IPC 2000 / 3000 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the IPC 2000 / 3000 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the IPC 2000 / 3000 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the IPC 2000 / 3000 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the IPC 2000 / 3000 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]semistarcorp.com — semistarcorp.comsemistarcorp.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
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Last updated Oct 10, 2026.

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