ASM
Eagle
Plate 01Semiconductor Cleanroom Tools: Introducing ASM Eagle XP4 for ALD | Fraunhofer IPMS
Fraunhofer IPMSWatch on YouTubePlate 02ASM Eagle 60 video 1 OK
NTCRaymondWatch on YouTubePlate 03Eagle sketch #art #asmarts #drawing #painting #pencilsketchtutorialforbeginners
ASM ArtsWatch on YouTubePlate 04Bookworm | DIY Eagle Sculpture #diy #art #craft
ASM Art+Watch on YouTubePlate 05F-15 ASAT Operation "Celestial Eagle Flight"
Black Hornet SimWatch on YouTubePlate 06Holding the world’s STRONGEST eagle 🦅 @birds4242 #shorts #eagles #aura #harpyeagle #maya
MayaWatch on YouTube
What it is
The ASM Eagle system is a plasma-enhanced atomic layer deposition (PEALD) tool.[2]
How it works
General reference — not yet source-verifiedThe system uses a vacuum chamber and gas delivery system to introduce process gases, which are activated by radio-frequency plasma to form a film.
Where it fits in the process flow
General reference — not yet source-verifiedThe ASM Eagle is used in the front-end-of-line and back-end-of-line deposition steps of integrated circuit fabrication.
The tool typically follows cleaning and oxidation steps and precedes lithography and etching steps in the process flow.
Applications
General reference — not yet source-verifiedThe ASM Eagle is used to deposit dielectric films such as silicon oxide and silicon nitride, as well as other insulating layers.
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Transfer Robot Blade missing
- Heater Pedestal missing
- Showerheads missing
- Buffer Plate missing
- Pumps missing
- RF Generators missing
- Front Robot Blade missing
- TEOS Flow Controller missing
What do the numbers mean?
Power & electrical1
- RF Generators[1]
Vacuum & pumping1
- Pumps[1]
Wafer handling2
Gas & chemistry2
Control & software2
- TEOS Flow Controller[1]
Configuration & options10
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Eagle XP8 | — | — | Plasma-enhanced atomic layer deposition (PEALD) configuration on the XP8 platform | web.archive.org[2] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Eagle are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Eagle are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Eagle are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Eagle is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Eagle are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the Eagle are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]web.archive.org — asm.com (Mar 10, 2014)web.archive.org
Last updated Oct 2, 2026.
Compare with similar tools
View all →
The Applied Materials 0010-13622 is an RF match unit intended for PVD (Physical Vapor Deposition) described as a High Efficiency HE RF Match-Bias.
The Applied Materials 0020 12458 Part is an insulator, side match component for the Hdp-Cvd Ultima Plus system.