Waferpedia

Comparison ledger

0020 17485 PartversusEagle

Applied Materials 0020 17485 Part, ASM Eagle, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 17485 PartApplied Materials
OEMApplied MaterialsASM
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17485 PartASM Eagle
Cited variants—
Specifications
ConfigurationStrap, RF Out 2 Balanced Coil Match, Hdp[2]2 chamber[3]
Gas—SiH4, N2O, C3F8[3]
OS—JDOS[3]
Process Type—PECVD[3]
Chamber Count—2[3]
Process Gases—SiH4, N2O, C3F8[3]
Operating System—JDOS[3]
Vintage—1998[3]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing
  3. [3]inventory listing