Waferpedia

Comparison ledger

0020 23839 PartversusEagle

Applied Materials 0020 23839 Part, ASM Eagle, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 23839 PartApplied Materials
OEMApplied MaterialsASM
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 23839 PartASM Eagle
Cited variants—
Specifications
ConfigurationPlate, Sensor Clamp, Hdpcvd Ultima +[2]2 chamber[3]
Gas—SiH4, N2O, C3F8[3]
OS—JDOS[3]
Process Type—PECVD[3]
Chamber Count—2[3]
Process Gases—SiH4, N2O, C3F8[3]
Operating System—JDOS[3]
Vintage—1998[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing
  3. [3]inventory listing