Tokyo Electron
Telindy Vertical
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Tel Telindy Vertical Furnace is a vertical furnace used for thermal processing. The Tel Telindy Vertical Furnace processes 12-inch (300 mm) wafers. The Tel Telindy Vertical Furnace is configured for ALD and Nitride processes.[1][2][3]
What it is
General reference — not yet source-verifiedVertical furnaces are a class of batch thermal-processing equipment used in semiconductor fabrication for processes such as oxidation, diffusion, annealing, and chemical vapor deposition.
How it works
General reference — not yet source-verifiedA vertical furnace loads wafers vertically into a quartz or silicon-carbide process tube, where they are heated by surrounding resistance-heated elements to controlled temperatures.
Gas delivery systems introduce reactive or inert gases from the top or bottom of the tube, and exhaust is removed from the opposite end to achieve uniform exposure across the wafer batch.
Where it fits in the process flow
General reference — not yet source-verifiedVertical furnaces are typically used in the front-end-of-line (FEOL) and middle-of-line (MOL) portions of the semiconductor fabrication flow.
Downstream steps after furnace processing include lithography, etch, and metallization, depending on the specific film or junction being formed.
Applications
General reference — not yet source-verifiedGeneral applications for vertical furnaces include gate oxidation, dopant diffusion, drive-in annealing, and the deposition of dielectric films such as silicon dioxide and silicon nitride.
What do the numbers mean?
Wafer handling1
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the typical temperature range for vertical thermal processing systems?General reference — not yet source-verified
Vertical thermal systems like this class generally operate at elevated temperatures, often between low hundreds and over a thousand degrees Celsius, depending on the specific process (e.g., oxidation or diffusion).
How does vertical orientation compare to horizontal furnaces in terms of uniformity?General reference — not yet source-verified
The vertical design often provides improved thermal uniformity and reduced particulate contamination, as the boat and wafers are loaded from the bottom and the tube geometry allows more even gas flow and temperature distribution.
What are the common process gases used in diffusion and oxidation systems?General reference — not yet source-verified
Typical gases include oxygen or steam for oxidation, and dopant-containing gases like diborane, phosphine, or arsine (often diluted in inert carriers such as nitrogen or argon) for diffusion processes.
Can this class of machine be used for low-temperature processes?General reference — not yet source-verified
While primarily designed for high-temperature processes, some models may support lower-temperature anneals, but the core application remains thermal diffusion and oxidation above eight hundred degrees Celsius.
What maintenance is typically required for a vertical thermal system?General reference — not yet source-verified
Regular maintenance includes cleaning or replacing the process tube and boat, inspecting heating elements and thermocouples, and checking gas delivery and exhaust systems to ensure process repeatability and safety.
Not publicly documented
The following facts about the Telindy Vertical are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Telindy Vertical are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Telindy Vertical are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Telindy Vertical are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Telindy Vertical are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Telindy Vertical is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]Equipment inventory listing
- [3]inventory listing
Last updated Sep 28, 2026.
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