Tool family
Tokyo Electron Telindy
Models in this family
The Telindy Plus I M 1 is an ALD furnace with a 125 wafer load size, dual boat system option, and 400 VAC 50/60 Hz 3-phase power.
The Telindy Plus I Rad Vertical is a vertical thermal processing system used in semiconductor manufacturing for diffusion, oxidation, and other high-temperature wafer processes.
The Tel Telindy Vertical Furnace is a vertical furnace for thermal processing on 12-inch wafers, supporting ALD and Nitride processes.
All entries
- Telindy Plus I M 1Tokyo Electron
The Telindy Plus I M 1 is an ALD furnace with a 125 wafer load size, dual boat system option, and 400 VAC 50/60 Hz 3-phase power.
CategoryDepositionWafer125 Wafer Load Size10 specs - Telindy Plus I Rad VerticalTokyo Electron
General referenceThe Telindy Plus I Rad Vertical is a vertical thermal processing system used in semiconductor manufacturing for diffusion, oxidation, and other high-temperature wafer processes.
CategoryThermal / Diffusion1 spec - Telindy VerticalTokyo Electron
The Tel Telindy Vertical Furnace is a vertical furnace for thermal processing on 12-inch wafers, supporting ALD and Nitride processes.
CategoryThermal / Diffusion4 specs