SUSS MicroTec

DSC500

Lithography 450 x 500 mm SUSS MicroTec DSC500 family

Research Quality: 40% complete

The DSC500 is an automated projection lithography system from SUSS MicroTec. The DSC500 provides full-field scanning projection exposure for substrates up to 450 x 500 mm. The DSC500 includes alignment capability.^[1]

Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

Wafer size

450 x 500 mm

Performance

Included^[1]

Optics

Full-Field Scanning Projection^[1]

What it is

The SUSS MicroTec DSC500 is an automated lithography system designed for large-area substrates.^[1]

As a full-field scanning projection system, the DSC500 is part of the projection lithography class of equipment, distinct from proximity mask aligners.^[1]

How it works

The DSC500 employs a full-field scanning projection exposure method, where the mask and substrate are aligned and then scanned to transfer the pattern.^[1]

Alignment is a key function of the system, enabling precise overlay of the pattern onto the substrate.^[1]

Where it fits in the process flow

General reference — not yet source-verified

In semiconductor and micro-device manufacturing, the DSC500 is positioned in the lithography step, where it patterns a photoresist layer on the substrate.

The lithography step is typically preceded by coating a photoresist and followed by developing, etching, or other pattern-transfer processes.

Applications

General reference — not yet source-verified

The DSC500 is applicable in microstructuring for markets such as semiconductors, MEMS, and advanced packaging, where high-resolution patterning on large substrates is required.

The system can be used for processes like redistribution layer patterning and other large-area lithography tasks in advanced packaging.

What do the numbers mean?

Wafer handling1

Substrate size: up to 450 x 500 mm^[1]

Optics & imaging1

Exposure method: Full-Field Scanning Projection^[1]

Performance1

Alignment: Included^[1]

Configuration & options2

Type: Projection Lithography^[1]
Automation: Automated system^[1]

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What replaced it?

siblingSUSS MicroTec DSC300 Gen2— Both are automated full-field scanning projection lithography systems; DSC300 handles substrates up to 300 mm, DSC500 handles substrates up to 450 x 500 mm.source^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the DSC500 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DSC500 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the DSC500 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the DSC500 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DSC500 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DSC500 is not on record.
Answerable by: an OEM datasheet or a fab qualification report