Semics

Opus 3 SD

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Opus 3 SD — Inventory photo — Fig. 01Opus 3 SDInventory photo^[1]

Power

200 - 240V^[1]

Performance

1 µm^[5]

What it is

The Semics Opus 3 SD is a wafer prober in test and probe equipment.^[1]^[4]^[5]

The Opus 3 SD is an automatic wafer probe system.^[5]

How it works

General reference — not yet source-verified

A wafer prober positions a semiconductor wafer and a probe assembly so electrical contact can be made with devices on the wafer surface for test and measurement.

An automatic wafer probe system coordinates wafer handling, chuck positioning, and probe contact to support repeated electrical probing across a wafer.

Where it fits in the process flow

The Opus 3 SD belongs to the test and probe category and the wafer probe system category.^[4]^[5]

Applications

General reference — not yet source-verified

Wafer probers are used for electrical test of devices on wafers in semiconductor manufacturing.

What do the numbers mean?

Power & electrical2

200 - 240V^[1]
Power: 200 - 240V^[4]

Wafer handling4

HTF Chuck Temperature Control: Up to 125°C^[4]
HTF Chuck Force: 300 kg^[4]
Chuck size: 180 x 175 mm^[5]
Wafer size: 6 Inches, 8 Inches, 12 Inches^[5]

Performance1

Accuracy: 1 µm^[5]

Dimensions & facilities1

Overall dimensions: 1530 x 1782 x 960 mm^[5]

Configuration & options8

15A^[1]; 50/60Hz^[1]
Ambient & Hot Temperature Capability: Up to 150°C^[4]
Current: 15A^[4]
Frequency: 50/60Hz^[4]
Operating temperature: -40 to 200 Degree C^[5]
Probing force: 450 kgf^[5]
Type: Automatic^[5]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Configuration200 - 240V^[1]
Power200 - 240V^[4]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Semics Opus 3 SD?

The Semics Opus 3 SD is a prober.^[4]

What category does the Opus 3 SD belong to?

The Opus 3 SD belongs to the test and probe category.^[4]

What is the model name?

The model name is Opus 3 SD.^[4]

Not publicly documented

The following facts about the Opus 3 SD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Opus 3 SD are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Opus 3 SD are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Opus 3 SD are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Opus 3 SD are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Opus 3 SD is not on record.
Answerable by: an OEM datasheet or a fab qualification report