Comparison ledger
KLA 1007, Semics Opus 3 SD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | Opus 3 SDSemics |
|---|---|---|
| OEM | KLA | Semics |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Semics Opus |
| Specifications | ||
| Manufacturer | KLA[1] | — |
| Model | 1007[1] | — |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | 6 Inches, 8 Inches, 12 Inches[5] |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | — |
| Configuration | — | 200 - 240V[3] |
| Ambient & Hot Temperature Capability | — | Up to 150°C[4] |
| HTF Chuck Temperature Control | — | Up to 125°C[4] |
| HTF Chuck Force | — | 300 kg[4] |
| Power | — | 200 - 240V[4] |
| Current | — | 15A[4] |
| Frequency | — | 50/60Hz[4] |
| Accuracy | — | 1 µm[5] |
| Chuck size | — | 180 x 175 mm[5] |
| Operating temperature | — | -40 to 200 Degree C[5] |
| Overall dimensions | — | 1530 x 1782 x 960 mm[5] |
| Probing force | — | 450 kgf[5] |
| Type | — | Automatic[5] |
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