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Nanospec 9300 Film Analysis

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Nanospec 9300 Film Analysis is a thin film thickness measurement tool. The Nanospec 9300 Film Analysis is a spectroscopic reflectometer. The Nanospec 9300 Film Analysis is currently configured for 12" wafers.[1]

Nanospec 9300 Film Analysis — Inventory photo
Fig. 01Nanospec 9300 Film AnalysisInventory photo[2]

Power

208 VAC, 18 A, 50/60 Hz[1]

Optics

4x, 15x (Visible & UV)[1]

What it is

The Onto Innovation Nanospec 9300 Film Analysis is a semiconductor metrology tool for film analysis.[2][3][1]

Applications

The Nanospec 9300 is used for thin-film thickness measurement.[1]

What do the numbers mean?

Power & electrical1

Input power
208 VAC, 18 A, 50/60 Hz[1]2 sources
Accurate?

Wafer handling3

Configured wafer size
12"[1]2 sources
Accurate?
Alternate wafer handling
Can be modified for 8" open cassette handling[1]2 sources
Accurate?
Wafer handling
Kensington Robot & Stage Asyst FOUP 300mm[1]2 sources
Accurate?

Optics & imaging3

Lens
4x, 15x (Visible & UV)[1]
Accurate?
Video camera
RS170 (B/W)[1]2 sources
Accurate?
Optics
4x, 15x (Visible & UV)[3]
Accurate?

Control & software2

System computer and monitor
Computer & LCD monitor[1]2 sources
Accurate?
Metrology software
Windows XP-based N2000 metrology software (Version N2000 4.2.90 Beta)[1]2 sources
Accurate?

Configuration & options9

Manufacturer
Onto Innovation / Nanometrics[3]
Accurate?
Model
Nanospec 9300[3]
Accurate?
Tool type
Film Analysis System[2]
Accurate?
Measurement application
Thin film thickness measurement[1]2 sources
Accurate?
Instrument type
Spectroscopic Reflectometer (SR)[1]2 sources
Accurate?
Visible light source
Tungsten halogen lamp[1]2 sources
Accurate?
UV light source
Deuterium arc lamp[1]2 sources
Accurate?
Head type
UV DIO[1]2 sources
Accurate?
Vintage year
2002[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Input power208 VAC, 18 A, 50/60 Hz[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What measurement task does the Nanospec 9300 Film Analysis perform?

The Nanospec 9300 Film Analysis performs thin-film thickness measurement.[3]

What type of metrology instrument is the Nanospec 9300 Film Analysis?

The Nanospec 9300 Film Analysis is a spectroscopic reflectometer.[3]

What wafer size is the Nanospec 9300 Film Analysis configured for?

The Nanospec 9300 Film Analysis is currently configured for 12-inch wafers.[3][1]

Not publicly documented

The following facts about the Nanospec 9300 Film Analysis are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Nanospec 9300 Film Analysis are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Nanospec 9300 Film Analysis are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Nanospec 9300 Film Analysis are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Nanospec 9300 Film Analysis are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Nanospec 9300 Film Analysis is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]wotol.com — wotol.comwotol.com
  2. [2]Inventory photo
  3. [3]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 8, 2026.

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