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Nikon

NSR S 210 D

LithographyNikon NSR family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

The Nikon NSR S 210 D is a deep-UV (DUV) lithography scanner used in semiconductor manufacturing. The machine is part of Nikon's NSR-S200 series of step-and-scan systems. The NSR S 210 D is designed for volume production of semiconductor devices at the 110nm resolution node.[1][2]

What do the numbers mean?

Optics & imaging1

Resolution
110nm[1]
Accurate?

Configuration & options3

Manufacturer
Nikon[1]
Accurate?
Tool type
Scanner[1]
Accurate?
Light-source product group
Deep UV[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the Nikon NSR S 210 D?

It is a Nikon scanner used in semiconductor manufacturing.[1]

Not publicly documented

The following facts about the NSR S 210 D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR S 210 D are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NSR S 210 D are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NSR S 210 D are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NSR S 210 D are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NSR S 210 D is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.org — nikonprecision.com (Jul 17, 2019)web.archive.org
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Last updated Sep 29, 2026.

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