Waferpedia

Nikon

NSR 1755 i 7 B i-Line

LithographyNikon NSR 1755 family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Nikon NSR 1755 i 7 B i-Line is a lithography stepper. The Nikon NSR 1755 i 7 B i-Line processes 6-inch wafers. The Nikon NSR 1755 i 7 B i-Line has a resolution of 0.5um.[1][2]

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What it is

The Nikon NSR 1755 i 7 B i-Line is a lithography stepper.[1][2]

How it works

General reference — not yet source-verified

A lithography stepper transfers circuit patterns from a mask onto a light-sensitive wafer surface by exposing one field at a time through projection optics.

An i-line stepper uses near-ultraviolet exposure in the i-line band to print patterned features on photoresist-coated wafers.

Where it fits in the process flow

General reference — not yet source-verified

The Nikon NSR 1755 i 7 B i-Line belongs in the front-end photolithography sequence where wafer coatings are patterned before subsequent etch and deposition steps.

The Nikon NSR 1755 i 7 B i-Line operates after resist preparation and mask alignment-related setup, and before resist development and downstream pattern transfer.

Applications

General reference — not yet source-verified

The Nikon NSR 1755 i 7 B i-Line is used for patterned lithography on semiconductor wafers.

The Nikon NSR 1755 i 7 B i-Line is suited to mature-node patterning flows that use i-line exposure.

What do the numbers mean?

Wafer handling1

Wafer size
6 inch[1]
Accurate?

Optics & imaging2

Resolution
0.5um[2]
Accurate?
Exposure type
i-line[1]
Accurate?

Configuration & options4

0.5um[1]
Accurate?
Manufacturer
Nikon[1]
Accurate?
Model
NSR 1755 i 7 B[1]
Accurate?
Vintage
1990[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the NSR 1755 i 7 B i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR 1755 i 7 B i-Line are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NSR 1755 i 7 B i-Line are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NSR 1755 i 7 B i-Line are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NSR 1755 i 7 B i-Line are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NSR 1755 i 7 B i-Line is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 11, 2026.

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