Laurell
H6-8 B
The Laurell H6-8 B is a spin coater. The Laurell H6-8 B is in the 650-series. The Laurell H6-8 B has a maximum substrate size of 200mm (7" x 7").[1]
What it is
How it works
General reference — not yet source-verifiedA spin coater deposits a liquid film on a substrate and uses rapid rotation to spread the film by centrifugal action. The rotating substrate leaves a more uniform coating after excess liquid is driven outward.
Resist processing equipment of this class is used with wafer-scale substrates and similar flat workpieces. The machine holds the substrate on a chuck, applies the coating material, and spins the substrate through a programmed sequence.
Where it fits in the process flow
General reference — not yet source-verifiedThe H6-8 B fits into front-end or laboratory coating steps before exposure and pattern transfer. The machine prepares a resist layer that can follow downstream alignment, exposure, and development operations.
A spin coater sits between substrate cleaning or preparation and later lithography steps. The coated substrate then proceeds to processes that define the final patterned film.
Applications
General reference — not yet source-verifiedThe H6-8 B is used for resist coating on flat substrates. The class is commonly used for photoresist and other liquid thin-film coatings on wafers and similar workpieces.
The H6-8 B supports coating workflows that require controlled film spreading and repeatable coverage. The equipment class is used in microfabrication and other processes that rely on uniform resist layers.
What do the numbers mean?
Wafer handling1
Control & software1
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the maximum substrate size of the H6-8 B?
The maximum substrate size of the H6-8 B is 200 mm.[1]
What mounting options are available for the H6-8 B?
The H6-8 B supports tabletop, in-deck, and on-deck mounting.[1]
Which family does the H6-8 B belong to?
The H6-8 B belongs to Laurell’s 650-series spin coater family.[1]
Not publicly documented
The following facts about the H6-8 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the H6-8 B are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the H6-8 B are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the H6-8 B are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the H6-8 B are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the H6-8 B is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]images.laurell.com — images.laurell.comimages.laurell.com
Last updated Oct 7, 2026.
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