Waferpedia

Laurell

H6-23 B

Resist Processing150mmLaurell H6-23 B family
Research Quality: 40% complete

The Laurell H6-23 B is a Spin Coater. The Laurell H6-23 B belongs to the 650-series. The Laurell H6-23 B has a maximum substrate size of ø 150mm (5" × 5").[1]

LaurellH6-23 B
No photo available yet

What it is

The Laurell H6-23 B is a spin coater for resist processing. The H6-23 B belongs to Laurell’s 650-series and uses a tabletop, in-deck, or on-deck mounting arrangement.[1]

How it works

General reference — not yet source-verified

A spin coater applies a liquid film to a substrate while the substrate rotates. Centrifugal force spreads the liquid across the surface and removes excess material.

A spin coating tool is used with flat substrates that need a thin and uniform coating. The machine holds the substrate on a rotating chuck and controls speed during the coating cycle.

Where it fits in the process flow

General reference — not yet source-verified

A spin coater sits in the resist coating stage of a lithography flow. The machine is used before exposure and pattern transfer steps.

The H6-23 B is suited to substrate preparation steps that require a controlled resist layer on a wafer or other flat carrier.

Applications

General reference — not yet source-verified

The H6-23 B is used for resist coating on flat substrates. The machine class is used in lithography-related processing for forming uniform thin films.

Spin coating tools are also used for other liquid coatings that require an even layer on the work surface.

What do the numbers mean?

Wafer handling1

Max. Substrate Size
ø 150mm (5" × 5")[1]
Accurate?

Control & software1

Controller
650-series[1]
Accurate?

Configuration & options3

Type
Spin Coater[1]
Accurate?
Max. RPM
12000 rpm[1]
Accurate?
Mounting Options
Tabletop, In-Deck, On-deck[1]
Accurate?
Interested in this tool?
Need help with this tool?Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What type of machine is the H6-23 B?

The H6-23 B is a spin coater.[1]

What is the maximum substrate size for the H6-23 B?

The maximum substrate size for the H6-23 B is 150 mm.[1]

Not publicly documented

The following facts about the H6-23 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the H6-23 B are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the H6-23 B are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the H6-23 B are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the H6-23 B are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the H6-23 B is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]images.laurell.com — images.laurell.comimages.laurell.com
Was this page accurate?

Last updated Oct 7, 2026.

Compare with similar tools

View all →