Lam Research
9600 Metal
Wafer size
Wafer chambers
Gas delivery
BCL3, C2, SF6, HE, AR[1]
What it is
How it works
General reference — not yet source-verifiedA metal etch tool removes patterned metal from wafers by plasma-assisted material removal after lithographic masking defines the target areas. A tool of this class is used to transfer the mask pattern into a metal layer through controlled gas chemistry and chamber conditions.
Where it fits in the process flow
Applications
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ChemistryBCL3, C2, SF6, HE, AR[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 9600 Metal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 9600 Metal are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 9600 Metal are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 9600 Metal are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 9600 Metal are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 9600 Metal is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Lam Research TCP 9600 Metal Etcher - CSI Semi — csisemi.comcsisemi.com
Last updated Oct 11, 2026.
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