Waferpedia

Disco

KR15

Dicing & Grinding8"Disco KR15 family
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The Disco KR15 is a dicing blade with a thickness of 200 microns. The Disco KR15 has a low grit. The Disco KR15 is used for cutting sapphire, glass, and silicon samples.[1]

DiscoKR15
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  • Plate 01SpookedJunglist Acting a fool at KR15

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What it is

The Disco KR15 is a compact linear actuator in THK’s KR series. The KR15 uses a full-ball LM guide actuator design with high rigidity, high accuracy, four-way equal load, and a space-saving form factor.[2]

How it works

General reference — not yet source-verified

A dicing and grinding stage uses precise axis motion to place a workpiece and tool with fine positional control. A motion platform in this class supports repeatable feed, alignment, and stroke control for semiconductor singulation and material removal tasks.

Where it fits in the process flow

General reference — not yet source-verified

Dicing belongs near the end of wafer processing, after device fabrication and before die separation into individual parts. Grinding belongs in wafer thinning and backside preparation flows that precede or accompany singulation.

Applications

General reference — not yet source-verified

The KR15 family is suited to precision motion in semiconductor and microfabrication equipment. The class is used where accurate linear positioning, high rigidity, and compact packaging matter.

  • Dicing sapphire, glass, and silicon

What do the numbers mean?

Configuration & options8

Blade designation
Disco KR15[1]
Accurate?
Blade thickness
200 micron[1]
Accurate?
Blade grit
low grit[1]
Accurate?
Intended materials
sapphire, glass, and silicon[1]
Accurate?
Max. workpiece size
Φ8"[1]
Accurate?
Thickness
200 micron[1]
Accurate?
Grit
Low grit[1]
Accurate?
Materials
sapphire, glass, and silicon[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
KR15-A/KR15-B——Available as without cover or with cover, and as direct motor coupling or motor wrap versions.thk.com[2]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What kind of motion component is the KR15?

The KR15 is a compact LM guide actuator in THK’s KR series.[2]

What are the load ratings for the KR15 LM guide unit?

The KR15 LM guide unit has a basic dynamic load rating of 1930 N and a basic static load rating of 3450 N.[2][3]

What configuration variants are available for the KR15?

The KR15 is offered without cover or with cover, and in direct motor coupling or motor wrap types.[2]

Not publicly documented

The following facts about the KR15 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the KR15 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the KR15 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the KR15 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the KR15 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the KR15 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]aggiefab.tamu.edu — aggiefab.tamu.eduaggiefab.tamu.edu
  2. [2]thk.com — thk.comthk.com
  3. [3]Models KR15-A/KR15-B With Cover, Motor Wrap|LM Guide Actuator|Product Information|THK Official Web Site [Japan/English] — thk.comthk.com
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Last updated Oct 3, 2026.

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