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Disco

DFL 7160 Laser Dicing

Dicing & GrindingDisco DFL 7160 family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Disco DFL 7160 Laser Dicing is a fully automatic laser saw for Φ300 mm wafers. The Disco DFL 7160 Laser Dicing uses a pulse laser to achieve non-thermal processing. The Disco DFL 7160 Laser Dicing supports full cut and DAF cut applications.[1][2]

DiscoDFL 7160 Laser Dicing
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Performance

0.003/310 mm (single error), 0.002/5 mm[1]

Optics

Fully automatic laser saw[1]

What it is

The Disco DFL 7160 is a fully automatic laser saw for wafer dicing.[1]

How it works

The DFL 7160 uses a pulse laser to achieve non-thermal processing.[1][2]

The DFL 7160 uses a short pulse laser to reduce processing distortion and deformation caused by heating.[1][2]

Where it fits in the process flow

The DFL 7160 processes wafers up to Φ300 mm.[1][2]

The DFL 7160 is used for full cut and DAF cut applications, and it is also used after DBG in some flows.[1][2]

Applications

The DFL 7160 supports GaAs full cut and DAF cut after DBG.[1][2]

The DFL 7160 supports removal of TEG on low-k grooves or streets and full cut for Si and compound semiconductors.[1][2]

The DFL 7160 includes a kerf check function that automatically checks and adjusts the laser cut position.[1][2]

The DFL 7160 can use a HogoMax coating and cleaning mechanism to help prevent wafer contamination from laser processing particles.[1][2]

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Non-operational

What do the numbers mean?

Optics & imaging4

Equipment type
Fully automatic laser saw[1]
Accurate?
Laser wavelength
355 nm[4]
Accurate?
Laser maximum power
18 W[4]
Accurate?
Z-axis moving resolution
0.00005 mm[1]
Accurate?

Performance2

Positioning accuracy
0.003/310 mm (single error), 0.002/5 mm[1]
Accurate?
Repeatability accuracy
0.002 mm[1]
Accurate?

Dimensions & facilities2

Equipment dimensions
1,200 × 1,550 × 1,800 mm[1]
Accurate?
Equipment weight
Approx. 1,750 kg[1]
Accurate?

Configuration & options8

Non-operational[3]
Accurate?
Max. workpiece size
Φ300 mm[1]
Accurate?
Processing method
Ablation[1]
Accurate?
X-axis processing range
310 mm[1]
Accurate?
Y-axis processing range
310 mm[1]
Accurate?
X-axis moving speed
0.1–600 mm/s[1]
Accurate?
X-axis index step
0.0001 mm[1]
Accurate?
θ-axis max. rotating angle
380 deg[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the DFL 7160 handle?

The DFL 7160 is for Φ300 mm wafers.[1][2]

What processing method does the DFL 7160 use?

The DFL 7160 uses ablation with a pulse laser for non-thermal processing.[1]

What kinds of cuts does the DFL 7160 support?

The DFL 7160 supports full cut and DAF cut applications.[1][2]

Does the DFL 7160 have any position-control function for cutting?

The DFL 7160 has a kerf check function that automatically checks and adjusts the laser cut position.[1][2]

Not publicly documented

The following facts about the DFL 7160 Laser Dicing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFL 7160 Laser Dicing are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DFL 7160 Laser Dicing are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DFL 7160 Laser Dicing are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the DFL 7160 Laser Dicing is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the DFL 7160 Laser Dicing are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]disco.co.jp — disco.co.jpdisco.co.jp
  2. [2]DFL7160 | AUROTECH CORPORATION — aurotech.comaurotech.com
  3. [3]inventory listing
  4. [4]semistarcorp.comsemistarcorp.com
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Last updated Oct 10, 2026.

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