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Comparison ledger

3220versusDFL 7160 Laser Dicing

Disco 3220, Disco DFL 7160 Laser Dicing, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
3220Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 3220Disco DFL 7160
Specifications
equipment typedicing saw[1]—
Workplace sizeø150 mm[2]—
Spindle layoutSingle[2]—
Spindle output1.5 kW at 30,000 min-1[2]—
Spindle max revolution speed40,000 min-1[2]—
X-axis feed speed range0.1 – 500 mm/s[2]—
Y-axis index step0.0001 mm[2]—
Z-axis repeating accuracy0.001 mm[2]—
Z-axis max blade sizeø58 mm[2]—
Configuration—Non-operational[3]
Equipment type—Fully automatic laser saw[4]
Max. workpiece size—Φ300 mm[4]
Processing method—Ablation[4]
Laser wavelength—355 nm[5]
Laser maximum power—18 W[5]
X-axis processing range—310 mm[4]
Y-axis processing range—310 mm[4]
X-axis moving speed—0.1–600 mm/s[4]
X-axis index step—0.0001 mm[4]
Positioning accuracy—0.003/310 mm (single error), 0.002/5 mm[4]
Z-axis moving resolution—0.00005 mm[4]
Repeatability accuracy—0.002 mm[4]
θ-axis max. rotating angle—380 deg[4]
Equipment dimensions—1,200 × 1,550 × 1,800 mm[4]
Equipment weight—Approx. 1,750 kg[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]inventory listing
  4. [4]disco.co.jpdisco.co.jp
  5. [5]semistarcorp.comsemistarcorp.com