Discovery

The Denton Vacuum Discovery is a series of magnetron sputtering deposition systems used for physical vapor deposition (PVD) of thin films. Magnetron sputtering is a plasma-based technique that creates dense films with good adhesion, suitable for metals and insulating materials with demanding optical or electrical properties.^[7][1]

The Discovery platform is highly configurable and can be tailored for different sputtering geometries, including confocal, planar (Discovery V), and inverted cylindrical (Discovery I) configurations. Variants include the Discovery 200 (for substrates up to 200 mm), Discovery 300 (for substrates up to 300 mm), Discovery V, Discovery I, and larger formats such as Discovery 635 and Discovery 785.^[2][8][5]

In magnetron sputtering, a magnetically confined plasma is created near the surface of a target material. Positively charged energetic ions from the plasma collide with the negatively charged target, ejecting atoms that then deposit onto a substrate. The closed magnetic field traps electrons, increasing ionization efficiency and allowing the plasma to be sustained at lower pressures, which reduces background gas incorporation and energy losses in the sputtered atoms.^[7][1]

The Discovery system can be configured with multiple cathodes in different geometries. In a confocal configuration, up to four cathodes are positioned around the substrate, enabling co-sputtering of multiple materials without breaking vacuum. The planar cathode (Discovery V) mounts directly above the substrate for high deposition rate and uniformity. The inverted cylindrical cathode (Discovery I) coats substrates on all sides, providing excellent thickness control on curved surfaces. Each cathode can be optimized for a specific deposition method, and the system supports DC, RF, and pulsed DC power supplies.^[1][3][2]

The Discovery magnetron sputtering platform is used for depositing thin films in a variety of industries. Typical applications include semiconductor device manufacturing, optical coatings for filters and lenses, metal and dielectric coatings for electronics, thin-film batteries, and protective or functional coatings such as diamond-like carbon and transparent conductive oxides.^[2][1]

Additional applications include high-volume production of advanced optical filters, biocompatible coatings for medical implants, thin film resistors and sensors, large area hybrid circuit fabrication, and metal contacts for compound semiconductors. The system also supports research and development activities.^[3][5]