Waferpedia

ASML

XT 1900 Gi

LithographyASML XT 1900 Gi family
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XT 1900 Gi — Inventory photo
Fig. 01XT 1900 GiInventory photo[1]

What is it?

The ASML XT 1900 Gi is an immersion scanner described with 193 mm optics, software version 5.1, CIM SECS, and a 40/45 nm process.

What do the numbers mean?

Wafer handling2

Wafer application
300 mm wafer batch production[3]
Accurate?
Throughput
131 wafers/hour (based on 125 exposures per wafer)[3]
Accurate?

Optics & imaging7

Process
40/45 nm[2]
Accurate?
Optics
193 mm[2]
Accurate?
Exposure wavelength
193 nm[3]
Accurate?
Numerical aperture
0.85~1.35[3]
Accurate?
Resolution
40 nm[3]
Accurate?
CDU
2.5 nm[3]
Accurate?
Overlay precision
6 nm[3]
Accurate?

Control & software1

Software Version
5.1[2]
Accurate?

Configuration & options3

Immersion Scanner
193 mm[1]
Accurate?
CIM
SECS[2]
Accurate?
Type
Immersion scanner[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the resolution of the ASML XT 1900 Gi?

The ASML XT 1900 Gi has a resolution of 40 nm.[3]

Not publicly documented

The following facts about the XT 1900 Gi are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the XT 1900 Gi are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the XT 1900 Gi are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the XT 1900 Gi are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the XT 1900 Gi are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the XT 1900 Gi is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.comwaferpedia.com
  3. [3]smartsystem.cn — smartsystem.cnsmartsystem.cn
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Last updated Oct 10, 2026.

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