Tokyo Electron Act

Models in this family

1. Act 8 I-Line Trackintroduced 1999i-line

   The Tel Act 8 I-Line Track is a photoresist track for 8-inch wafers, offered in 1C/3D and 2C/2D configurations, with manufacturing spanning 1999 to 2001.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Act 8 I-Line Track, 8" 1C/3D	I-Line	1999	Listed with 1C/3D configuration and 1999 vintage.	Equipment inventory listing[1]
   Act 8 I-Line Track, 8" 2C/2D	I-Line	2001	Listed with 2C/2D configuration and 2001 vintage.	Equipment inventory listing[2]
   Tel Act 8 I-Line Track, 8" 1C/3D 1999 Vintage	i-line	1999	—	Equipment inventory listing[1]
   Tel Act 8 I-Line Track, 8" 1C/3D 2000 Vintage	i-line	2000	—	Equipment inventory listing[3]
   Tel Act 8 I-Line Track, 8" 2C/2D 2000 Vintage	i-line	2000	—	Equipment inventory listing[4]
   Tel Act 8 I-Line Track, 8" 2C/2D 2001 Vintage	i-line	2001	—	Equipment inventory listing[2]
   Act 8 1C/3D (1999)	I-line	1999	1 coat, 3 develop modules	Equipment inventory listing[1]
   Act 8 1C/3D (2000)	I-line	2000	1 coat, 3 develop modules	Equipment inventory listing[5]
   Act 8 2C/2D (2000)	I-line	2000	2 coat, 2 develop modules	Equipment inventory listing[4]
   Act 8 2C/2D (2001)	I-line	2001	2 coat, 2 develop modules	Equipment inventory listing[2]

2. 

   Act 8

   The Tokyo Electron Act 8 is a coater/developer system for 8-inch wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Act 8 Coater / Developer - Dual Block, 4 Load Port/1 Side Port - 4 Coaters - 3 Developers - 1 TCT - 14 PHP Hot Plates	—	2006	Listed with dual-block configuration and the specified port, coater, developer, TCT, and hot-plate counts; described as 2006 vintage.	Equipment inventory listing[6]
   Act 8 Coater / Developer, 8" - Single	—	2014	Listed as single configuration; described as 2014 vintage.	Equipment inventory listing[7]
   Act 8 Coater / Developer, 8"	—	2000–2001	Listed as 2000, 2001 vintage.	Equipment inventory listing[8]
   Tel Act 8 Coater / Developer, 8" - Single	—	2014	Described as a single vintage 2014 configuration.	Equipment inventory listing[7]
   Tel Act 8 Coater / Developer - Dual Block, 4 Load Port/1 Side Port - 4 Coaters - 3 Developers - 1 TCT - 14 PHP Hot Plates	—	2006	Described with a dual-block configuration and the listed ports, coater/developer count, TCT, and hot plates; vintage 2006.	Equipment inventory listing[6]
   Tel Act 8 Coater / Developer, 8"	—	2000–2001	Described as vintage 2000, 2001.	Equipment inventory listing[8]

3. Act 8 AC

   The Tokyo Electron Act 8 AC is a semiconductor equipment unit listed in an inventory as needing repair.

4. 

   Act 8 Coater Developer Track
5. Act 8 DUV Track
6. 

   Act 8 Metal

   Tokyo Electron Act 8 Metal Etcher is a metal etcher with 2 chamber DPS Metal, 2 chamber ASP+, 2 orienter/degas, and Lynx OS.

Sources