Waferpedia

Tool family

Tegal Plasmaline 411

The Tegal Plasmaline 411 is a plasma asher listed among Tegal plasma processing equipment and parts. The Tegal Plasmaline 411 is associated in the source text with asher, plasma oven, and AR O2 etcher descriptions.

Models in this family

  1. The Tegal Plasmaline 411 is a plasma asher listed among Tegal plasma processing equipment and parts. The Tegal Plasmaline 411 is associated in the source text with asher, plasma oven, and AR O2 etcher descriptions.