Tegal 9XX

Models in this family

1. 9XX

   The Tegal 9XX is a series of etchers that includes the Tegal 901, Tegal 903, and Tegal 915 models.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Tegal 901	—	—	—	legacysemi.com[1]
   Tegal 903	—	—	—	legacysemi.com[1]
   Tegal 915	—	—	—	legacysemi.com[1]
   901e	—	—	Table Top, Standard	legacysemi.com[1]
   903e	—	—	Table Top, Upgraded	legacysemi.com[1]
   903e Direct Cooled TTW	—	—	Direct Cooled TTW, Standard	legacysemi.com[1]
   915e	—	—	—	legacysemi.com[1]

Sources