Waferpedia
Waferpedia
/
Tegal
/
Tegal 803
Tool family
Tegal 803
Tegal
·
Etch
·
1 entry
The Tegal 803 is an inline automatic wafer RF plasma etcher.
LinkedIn
X
Email
Copy link
Models in this family
803
The Tegal 803 is an inline automatic wafer RF plasma etcher.