Waferpedia

Tool family

OAI Model 32

OAILithography1 entry

The OAI Model 32 is a UV exposure system manufactured by Optical Associates, Inc. (OAI) and listed in OAI's datasheet resources.

Models in this family

  1. The OAI Model 32 is a UV exposure system manufactured by Optical Associates, Inc. (OAI) and listed in OAI's datasheet resources.