Waferpedia

Tool family

Canon FPA

CanonLithography4 entries
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Models in this family

  1. FPA 2000 i 2

    The Canon FPA 2000 i 2 is a stepper.

  2. FPA 2001 i 1
  3. FPA 3030 i 5+ Fine Pattern

    The Canon FPA 3030 i 5+ Fine Pattern is a lithography stepper with an i-line 365 nm source, a 5:1 reduction ratio, and a 22 mm x 22 mm field size.

  4. FPA 5000 ES 3

    Canon FPA 5000 ES 3 is a lithography stepper identified with a Cymer ELS 6300 Laser and a Rasco BCU 900 Brine Chilling Unit.

All entries

  1. FPA 2000 i 2Canon

    The Canon FPA 2000 i 2 is a stepper.

    CategoryLithography
    1 spec
  2. FPA 2001 i 1Canon
    CategoryLithography
    1 spec
  3. FPA 3030 i 5+ Fine PatternCanon

    The Canon FPA 3030 i 5+ Fine Pattern is a lithography stepper with an i-line 365 nm source, a 5:1 reduction ratio, and a 22 mm x 22 mm field size.

    CategoryLithography
    14 specs
  4. FPA 5000 ES 3Canon

    Canon FPA 5000 ES 3 is a lithography stepper identified with a Cymer ELS 6300 Laser and a Rasco BCU 900 Brine Chilling Unit.

    CategoryLithography
    10 specs