Waferpedia

Tool family

ASML TWINSCAN NXE:3300

ASMLLithography1 entry

The TWINSCAN NXE:3300 was the first EUV production system, shipped in 2013.

Models in this family

  1. TWINSCAN NXE:3300introduced 2013produced 2013–

    The TWINSCAN NXE:3300 was the first EUV production system, shipped in 2013.