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ASML TWINSCAN NXE:3300
Tool family
ASML TWINSCAN NXE:3300
ASML
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Lithography
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1 entry
The TWINSCAN NXE:3300 was the first EUV production system, shipped in 2013.
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Models in this family
TWINSCAN NXE:3300
introduced 2013
produced 2013–
The TWINSCAN NXE:3300 was the first EUV production system, shipped in 2013.