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Comparison ledger

.498 PSL WaferversusNSX 105 Rev D Wafer

KLA .498 PSL Wafer, Onto Innovation NSX 105 Rev D Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
.498 PSL WaferKLA
NSX 105 Rev D WaferOnto Innovation
OEMKLAOnto Innovation
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferOnto Innovation NSX 105 Rev D Wafer
Specifications
ConfigurationNIST Traceable[1]—
NIST traceabilityYes[1]—
Full Load—6 A[2]
Largest Load—1.5 A[2]
Voltage—200-240 VAC[2]
Frequency—50/60 Hz[2]
Vintage—2012[2]
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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing