Onto Innovation
NSX 105 Rev D Wafer
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Onto Innovation NSX 105 Rev D is an automated wafer inspection system used in semiconductor manufacturing for detecting surface defects on wafers. The model designation indicates its lineage spanning Onto Innovation, Rudolph Technologies, and August Technology. The system operates on electrical requirements of 200-240 VAC at 50/60 Hz, with a full load current of 6 A and a largest load current of 1.5 A.[1]
How it works
General reference — not yet source-verifiedThe system's architecture includes a precision wafer stage for submicron positioning, an imaging module with a sensor (CCD or CMOS), and a high-speed data processing unit. Inspection recipes define scan patterns, sensitivity thresholds, and illumination settings. The tool can operate in both brightfield and darkfield modes depending on the layer and defect type being targeted.
What do the numbers mean?
Power & electrical2
Configuration & options3
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the NSX 105 Rev D Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSX 105 Rev D Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSX 105 Rev D Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSX 105 Rev D Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSX 105 Rev D Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSX 105 Rev D Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Sep 24, 2026.
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