Comparison ledger
Electroglas EG4, Filmetrics RS50, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EG4Electroglas | RS50Filmetrics |
|---|---|---|
| OEM | Electroglas | Filmetrics |
| Category | Test & Probe | Test & Probe |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Electroglas EG4 | Filmetrics RS50 |
| Cited variants |
| — |
| Specifications | ||
| Type | wafer prober[2] | 4 Point Probe System Mapping 4 point Probe system[3] |
| Wafer size | 200mm[2] | — |
| Z-force | up to 150 kilograms[2] | — |
| Z-drive | probe-centered Z-drive[2] | — |
| Z-drive type | Probe centered Z-drive[2] | — |
| Sheet resistance range | — | 1 mohm/sq to 200 Mohm/sq[3] |
| Wafer capability | — | 200 mm wafers capable[3] |
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