Waferpedia

Comparison ledger

0010-21246 PartversusVision 2000-E™

Applied Materials 0010-21246 Part, MKS Vision 2000-E™, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
OEMApplied MaterialsMKS
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—MKS Vision 2000-E™
Specifications
Product type—Residual Gas Analyzer (Mass Spectrometer)[1]
Application—Multi-pressure, CVD & ALD processes[1]
Minimum detectable partial pressure—< 2e-11 Torr[1]
Monitoring capability—Continuous in situ monitoring[1]
Leak and contamination monitoring—Baseline monitoring for air leaks and background contamination[1]
Vacuum safety—Remote Vacuum Controller (RVC) for failsafe vacuum operation[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]api.p1.mks.comapi.p1.mks.com