Comparison ledger
Applied Materials 0010-03254 E Chuck, Pfeiffer Adixen ADS 501, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | Adixen ADS 501Pfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Pfeiffer Adixen ADS 501 |
| Specifications | ||
| Type | — | Dry pump[1] |
| Inlet | — | ISO100[1] |
| Exhaust | — | KF40[1] |
| Pumping speed (60 Hz) | — | 300 CFM[1] |
| Ultimate pressure (60 Hz) | — | 6 x 10^-4 Torr[1] |
| Weight | — | 844 lbs[1] |