Pfeiffer
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The Pfeiffer / Adixen ADS 501 is a dry vacuum pump. The model is also known as the Alcatel Adixen ADS 501 and as the Alcatel ADS-501.[2][1]
The ADS 501 has an ISO100 inlet and a KF40 exhaust. At 60 Hz operation, the pump delivers a pumping speed of 300 CFM. At 60 Hz operation, the pump reaches an ultimate pressure of 6 x 10-4 Torr. The ADS 501 weighs 844 lbs.[1]
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The Pfeiffer / Adixen ADS 501 is a dry pump.[1]
The ADS 501 uses an ISO100 inlet and a KF40 exhaust.[1]
The ADS 501 delivers a pumping speed of 300 CFM at 60 Hz.[1]
The ADS 501 achieves an ultimate pressure of 6 x 10-4 Torr at 60 Hz.[1]
The ADS 501 is used for semiconductor processes including stripping, etching, PECVD, LPCVD, MOCVD, and epitaxy, for scientific research, and for clean and corrosive processes.[1]
The following facts about the Adixen ADS 501 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Adixen ADS 501 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Adixen ADS 501 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Adixen ADS 501 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Adixen ADS 501 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Adixen ADS 501 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 2, 2026.