Comparison ledger
Accretech APM 90, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | APM 90Accretech | 1007KLA |
|---|---|---|
| OEM | Accretech | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech APM 90 | KLA 1007 |
| Specifications | ||
| Configuration | Nickle Chuck[1] | — |
| Temp range | 25-150 grad[1] | — |
| Missing | Joystick, Display, HDD, Cleaning Unit Ceramic[2] | — |
| Wafer Sizes | 6, 8 inch[1] | — |
| Chuck Material | Nickel[1] | — |
| Temperature Range | 25-150 °C[1] | — |
| Loader Type | Single loader[1] | — |
| Chuck Planarity | ~19 µm[1] | — |
| Manufacturer | — | KLA[4] |
| Model | — | 1007[4] |
| Description | — | Wafer Prober[4] |
| Wafer size | — | 150 mm[4] |
| Convertible to 8 inch wafer size | — | Yes[4] |
| Vintage | — | 01.06.1995[4] |
| Make | — | KLA[5] |
| Equipment type | — | Prober[5] |
Plan your fab
Building a Test & Probe process? Get a complete equipment list.
Open the fab equipment planner →