Waferpedia

Accretech

APM 90

Test & ProbeAccretech APM 90 family
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The Accretech / TSK APM 90 Prober is a wafer prober for 6 and 8 inch wafers. The APM 90 uses a nickel chuck and has a temperature range of 25 to 150 degrees Celsius.[1][2][3][4]

APM 90 — Inventory photo
Fig. 01APM 90Inventory photo[1]

What it is

The Accretech APM 90 is a semiconductor wafer prober.[1][2][3][4]

How it works

General reference — not yet source-verified

A wafer prober positions a probe assembly onto a wafer so electrical test contact can be made at selected sites on the wafer surface.

Where it fits in the process flow

General reference — not yet source-verified

A wafer prober sits in electrical wafer test and characterization flow before full device packaging.

A wafer prober is used after wafer fabrication steps that create devices on the wafer and before downstream assembly or final package test.

Applications

General reference — not yet source-verified

A wafer prober is used for semiconductor wafer-level testing, parameter measurement, and device evaluation.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Gas spring of headplaten is worn out
  • Missing: Joystick, Display, HDD, Cleaning Unit Ceramic

What do the numbers mean?

Wafer handling7

Nickle Chuck[1]
Accurate?
Single loader[1]
Accurate?
Chuck planarity ~ 19um[1]
Accurate?
Wafer Sizes
6, 8 inch[1]
Accurate?
Chuck Material
Nickel[1]
Accurate?
Loader Type
Single loader[1]
Accurate?
Chuck Planarity
~19 µm[1]
Accurate?

Gas & chemistry1

Gas spring of headplaten is worn out[1]
Accurate?

Configuration & options5

Temp range
25-150 grad[1]
Accurate?
Missing
Joystick, Display, HDD, Cleaning Unit Ceramic[2]
Accurate?
Includes OCR[4]
Accurate?
Temp range
25-15- grad[4]
Accurate?
Temperature Range
25-150 °C[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationGas spring of headplaten is worn out[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

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Frequently asked questions

What loader configuration does it have?

The APM 90 is equipped with a single loader.[1][2][3][4]

Not publicly documented

The following facts about the APM 90 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the APM 90 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the APM 90 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the APM 90 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the APM 90 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the APM 90 are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Equipment inventory listing
  4. [4]inventory listing
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Last updated Oct 5, 2026.

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