Nikon
NSR S 204 B alternatives
Comparable Lithography equipment documented in the Waferpedia catalog.
6 comparable tools
ASML
Twinscan XT 1400 F
Lithography
The ASML Twinscan XT 1400 F Scanner is a 193nm (ArF) lithography scanner stated to handle 12-inch wafers.
Brooks
017-0024-01 Prealigner
Lithography
Brooks
017-0146-01 Prealigner
Lithography
Brooks 017-0146-01 is a prealigner manufactured by Brooks.
Ultratech
1000 Family
Lithography
EV Group
101
Lithography
The EVG 101 is an advanced resist processing system for spin or spray coating and developing of wafers up to 300 mm.
SUSS MicroTec
150 e Mask
Lithography
The SUSS 150 e is a mask aligner manufactured by SUSS MicroTec.
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