Waferpedia

Comparison ledger

0035235-003 MMD HeadversusFLX-2320-S

KLA 0035235-003 MMD Head, Toho Technology FLX-2320-S, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
FLX-2320-SToho Technology
OEMKLAToho Technology
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadToho Technology FLX-2320-S
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]—
Model0035235-003[1]—
MakeKLA[1]—
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]—
Compatible SystemKLA AIT-XP[1]—
Measurement principle—Measures the change in the radius of curvature of a wafer or substrate caused by deposition of a stressed thin film.[2]
Use case—Thin-film stress measurement.[2]
Function—Measures the change in the radius of curvature of a wafer or substrate caused by the deposition of a stressed thin film.[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]epfl.chepfl.ch