Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Plasma-Therm Versaline VCX 600 ICP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Versaline VCX 600 ICPPlasma-Therm |
|---|---|---|
| OEM | Applied Materials | Plasma-Therm |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Plasma-Therm Versaline |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | 6 inch[3] |
| Electrode Configuration | Dual[2] | — |
| Phase | — | 1 Phase[3] |
| Configuration | — | 3 Wire[3] |
| Source Generator | — | ENI MKS GMW25[3] |
| Electrical Input | — | 1 Phase, 3 Wire, 50/60 Hz, 208/230 Vac, 15 A[3] |
| Included Equipment | — | Chillers, Transformer, Pumps[3] |
| Electrical Configuration | — | 1 Phase - 3 Wire - 50/60 Hz - 208/230 Vac - 15 A[3] |
| Vintage | — | 2013, 2014[3] |
| Included Components | — | Chillers, Transformer, Pumps[3] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →