Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Applied Materials Centura TPCC RTP XE+, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Centura TPCC RTP XE+Applied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Applied Materials Centura TPCC |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | 8 inch[3] |
| Electrode Configuration | Dual[2] | — |
| CH A | — | XE+ Non-Toxic ATM[3] |
| Configuration | — | Chemraz O-Ring[3] |
| Edge Ring | — | S2[3] |
| Bearing Type | — | Standard[3] |
| CH B | — | Empty[3] |
| CH C | — | Empty[3] |
| CH D | — | Empty[3] |
| CH E | — | Single Slot Fast Cooldown[3] |
| CH F | — | Single Slot Fast Cooldown[3] |
| Gas Line Purge | — | N2-10 SLM[3] |
| Gas Line 1 | — | 02-10 SLM[3] |
| Chamber A Configuration | — | XE+ Non-Toxic ATM - Chemraz O-Ring - RGA Port and Valve - MWBC - Edge Ring: S2 Bearing Type: Standard[3] |
| Chamber E and F Configuration | — | Single Slot Fast Cooldown[3] |
| Robot | — | Asyst LPT2200 SMIF Robot[3] |
| Controller | — | Vita Computer Controller (Modular Controller)[3] |
| Gas Delivery | — | 10 Ra Gas Panel, Top Feed Gas Line Input, Multiple Line Drop Gas Distribution, Gas Line Purge: N2-10 SLM, Gas Line 1: O2-10 SLM, Gas Line 2: N2-20 SLM, Gas Line 3: O2 1 SLM, STEC Z500 MFC Type First Manifold[3] |
| Heat Exchanger | — | SMC 40 GPM Stainless Steel Heat Exchanger[3] |
| Gas Line 2 | — | N2-20 SLM[3] |
| Gas Line 3 | — | 02 1SLM SLM[3] |
| Gas Line 4 | — | None[3] |
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