Waferpedia

Comparison ledger

0010-14300 Magnet Assyversus9500 Ion

Applied Materials 0010-14300 Magnet Assy, Applied Materials 9500 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-14300 Magnet AssyApplied Materials
9500 IonApplied Materials
OEMApplied MaterialsApplied Materials
CategoryIon ImplantationIon Implantation
Wafer size—Wafer orientor
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—1993 Vintage
Control system——
Generation——
FamilyApplied Materials 0010-14300 Magnet AssyApplied Materials PI 9500
Cited variants—
Specifications
ConfigurationP4 Magnet Assy, IMP[2]RGA[3]
Gearbox P/N0010-27417[2]—
Part Number0010-14300[2]—
DescriptionP4 Magnet Assy, IMP[2]—
Frequency—60 Hz[3]
Water fittings—Imperial[3]
Remote distance—~6m umbilical[3]
Layout—Thru wall[3]
Wafer cassette—25 wafers[3]
Turbo pumps type—Seiko Seiki[3]
Mech pumps type—Edwards[3]
Cryo pumps type—Cryotorr[3]
Second compressor—9600 (qty 2)[3]
Helium line length—15 m[3]
Factory interface—SECS/GEM[3]
Wafer size—Wafer orientor[3]
Tilt angle—Variable 0-7[3]
Wheel type—Standard[3]
Beamstop—Enlarged Beam Stop[3]
Plasma Flood System—HDPFS[3]
Beamline—Standard[3]
Source type—Bernas[3]
Front plate—Tungsten[3]
Line Frequency—60 Hz[4]
Utilities—Top[4]
Wafer Fittings—Imperial[4]
Remote Distance—6 m umbilical[4]
Wafer Size—6 inch[3]
Wafer Cassette Capacity—25 wafers[3]
Tilt Angle—Variable 0-7 degrees[3]
Front Plate Material—Tungsten[3]
Extraction Type—Single bellows[3]
TEM—No[3]
Source Chamber Liners—Yes[3]
MRS Chamber Liners—Yes[3]
Gas Position 1—Boron[3]
Gas Position 2—N/A[3]
Gas Position 3—Available SDS[3]
Gas Position 4—Arsine[3]
TFT Monitor Upgrade—Yes[3]
Wafer Orientor—Yes[3]
RGA—Yes[3]
Turbo Pump Type—Seiko Seiki[3]
Mech Pump Type—Edwards[3]
Cryo Pump Type—Cryotorr[3]
Wafer Size (Source 2)—6 inch[4]
Wafer Cassette Capacity (Source 2)—25 wafers[4]
Tilt Angle (Source 2)—Variable 0-7 degrees[4]
Wheel Type (Source 2)—Standard[4]
Source Type (Source 2)—Bernas[4]
Front Plate Material (Source 2)—Tungsten[4]
Extraction Type (Source 2)—Single Bellows[4]
Source Chamber Liners (Source 2)—Yes[4]
MRS Chamber Liners (Source 2)—Yes[4]
Gas Position 1 (Source 2)—N/A[4]
Gas Position 2 (Source 2)—N/A[4]
Gas Position 3 (Source 2)—Phosphine[4]
Gas Position 4 (Source 2)—Arsine[4]
TFT Monitor Upgrade (Source 2)—Yes[4]
Wafer Orienter (Source 2)—Yes[4]
RGA (Source 2)—No[4]
Line Frequency (Source 2)—60 Hz[4]
Remote Distance (Source 2)—6 m umbilical[4]
Layout (Source 2)—Through wall[4]
Turbo Pump Type (Source 2)—Leybold[4]
Mech Pump Type (Source 2)—Edwards[4]
Cryo Pump Type (Source 2)—CTI Helix Onboard[4]
Second Compressor (Source 2)—Yes 9600 (2)[4]
Helium Line Length (Source 2)—15 m[4]
Hydrogen Generator—No[4]
Vaporizers—No[4]
Toxic Gas Alarm—No[4]
VESDA—No[4]
Auto Cryo Purge—No[4]
Wafer Size (Source 3)—200mm[1]
Description (Source 3)—Ion Implanter (High Current)[1]
Gas position 4 (Arsine)—Arsine[3]
Implanter type—High Current[1]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing