Waferpedia

Comparison ledger

E 500versus0216 7696, E 11368072 ESC

Agilent E 500, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
E 500Agilent
OEMAgilentVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAgilent E 500Varian 0216 7696, E 11368072 ESC
Cited variants—
Specifications
ConfigurationMedium Current[2]Platen ADV-S Type[4]
ManufacturerAgilent[3]—
CategoryIon Implantation[3]Ion Implantation[5]
Wafer size8 inch[2]—
TypeMedium current ion implanter[3]ESC Platen ADV-S Type[4]
Vintage1996 vintage[2]—

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Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing
  5. [5]waferpedia.comwaferpedia.com