Waferpedia

Wafer size

50mm

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2 entries

  1. CV200 RFSYES

    The YES CV200 RFS Plasma Strip / Descum System is a plasma stripping and descum tool for photoresist, polyimide, organics removal, and descum processes.

    CategoryWet Processing / CleanWafer50mm
  2. Mini Tytan 4600Tystar

    The Tystar Mini-Tytan 4600 Furnace system is designed for diffusion, oxidation, and LPCVD applications.

    CategoryThermal / DiffusionWafer50mm