Zeiss
Sigma 300 VP FE-SEM
What it is
The Zeiss Sigma 300 VP is a field emission scanning electron microscope (FE-SEM). The Sigma 300 VP includes a Bruker XFlash 6 I 30 detector. The Sigma 300 VP operates on 50/60 Hz with supply voltages of 230 Vac and 208 Vac. The Sigma 300 VP has a current rating of 16 A and a short-circuit current rating (SCCR) of 3.5 kA.[1][2]
How it works
General reference — not yet source-verifiedA field emission scanning electron microscope generates electrons through field emission from a sharp tip. The electrons are accelerated and focused by electromagnetic lenses into a fine probe. The probe is scanned across the sample in a raster pattern.
When the electron beam strikes the sample, it produces secondary electrons, backscattered electrons, and characteristic X-rays. Secondary electrons are used for topographical imaging. Characteristic X-rays are used for elemental analysis when an energy-dispersive X-ray detector is present.
Where it fits in the process flow
General reference — not yet source-verifiedIn a semiconductor fab, a scanning electron microscope is used after pattern transfer processes to measure critical dimensions and to inspect for defects. Such instruments are also used in failure analysis to examine device structures. Scanning electron microscopes provide the magnification and resolution needed to verify process results.
Applications
What do the numbers mean?
Power & electrical4
- 50/60 Hz[1]
Optics & imaging2
- with Bruker XFlash 6 I 30 Detector[1]
Configuration & options6
- 16A / SCCR 3.5 kA[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Sigma 300 VP FE-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Sigma 300 VP FE-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Sigma 300 VP FE-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Sigma 300 VP FE-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Sigma 300 VP FE-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Sigma 300 VP FE-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]PPT - Zeiss Sigma 300 VP FE-SEM PowerPoint Presentation, free download - ID:14053573 — slideserve.comslideserve.com
Last updated Sep 26, 2026.
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