YES
253B-60-2-2
The MKS Type 253B-60-2-2 is an exhaust throttle valve. The MKS Type 253B-60-2-2 is a butterfly valve designed to regulate removal of gas from a vacuum chamber when used with an MKS controller. The MKS Type 253B-60-2-2 has an ASA 2 inch flange configuration in the ASA flange specifications.[1]
How it works
The Type 253B is a valve, so its function is to modulate exhaust flow rather than to generate vacuum or process material directly.[1]
What can it run?
Process applications and technology nodes documented for this tool.
- vacuum chamber gas removal
- vacuum pressure control
- high vacuum pump throttling
What do the numbers mean?
Power & electrical2
Vacuum & pumping3
- Function
- regulate removal of gas from a vacuum chamber; sealing-valve versions can shut off the removal of gas[1]
Optics & imaging1
Control & software2
- Controller connection
- Type 651, 652, 152G, or 252D/252E controllers via listed interface cables[1]
Dimensions & facilities1
Configuration & options14
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the device type?
The device is an MKS Type 253B exhaust throttling valve.[1]
Not publicly documented
The following facts about the 253B-60-2-2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 253B-60-2-2 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 253B-60-2-2 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 253B-60-2-2 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 253B-60-2-2 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 253B-60-2-2 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
Last updated Oct 9, 2026.
Compare with similar tools
View all →
The Applied Materials 0010-13627 is a high efficiency RF match designed for semiconductor equipment.