YES
1518
Wafer size
4-inch, 5-inch, 6-inch, 8-inch
Performance
2 full loads/hr.[1]
What it is
How it works
The YES 1518 supports HMDS prime and image reversal, and the image reversal process reverses the action of positive resist so that negative images can be formed.[1]
Where it fits in the process flow
Applications
The YES 1518 is used for HMDS priming and image reversal in resist processing.[1]
The image reversal function supports negative imaging, sidewall-profile variation, and lift-off-oriented processing.[1]
- HMDS prime
- image reversal
- vapor prime
What do the numbers mean?
Power & electrical1
Wafer handling4
- Capacity for HMDS Prime
- 8 cassettes of 4 in. wafers, or 1 cassette of 5-8 in. wafers[1]2 sources
- Capacity for Image Reversal
- 4 cassettes of 4 in. wafers, or 1 cassette of 5-8 in. wafers[1]2 sources
- Cleanliness
- < 1 x 1 micron particle and < 10 x 1 micron particles per 6 in. wafer[1]2 sources
Performance2
Dimensions & facilities3
- Chamber dimensions
- 20-in (508mm) High; 20-in (508mm) Wide; 15.12-in (384mm) Deep[2]2 sources
Configuration & options7
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| YES-1518SM | — | — | Silylation variant; source states it has above-listed capacities for Vapor Prime and Image Reversal, or Silylation on 4 cassettes of 5 or 6-inch wafers or 6 cassettes of 4-inch wafers. | web.archive.org[2] |
What replaced it?
Related models
- siblingYES YES-310TA— Source groups it as another dual-function model in the same specification chart.source[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Power115V, 60Hz, 1 Phase, 30A or 220V, 50 Hz, 1 Phase, 15A[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the YES 1518 support?
The YES 1518 supports cassettes of 4-inch through 8-inch wafers.[3][1]
What is the wafer capacity for HMDS prime?
Capacity for HMDS prime is 8 cassettes of 4-inch wafers, or 1 cassette of 5-8 inch wafers.[1][3]
What is the wafer capacity for image reversal?
Capacity for image reversal is 4 cassettes of 4-inch wafers, or 1 cassette of 5-8 inch wafers.[1][3]
What is the throughput of the YES 1518?
Throughput for HMDS prime is 2 full loads per hour; throughput for image reversal is 2 and one-half loads per hour.[1][3]
Not publicly documented
The following facts about the 1518 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1518 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 1518 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 1518 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 1518 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 1518 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]YES 1518 family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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