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Woollam

M-2000

Metrology & InspectionWoollam M-2000 family
Research Quality: 60% complete
M-2000 — colorado.edu
Fig. 01M-2000colorado.edu[1]
  • Plate 01J.A. Woolam M-2000 training video

    Eyring Materials CenterWatch on YouTube
  • Plate 02ASU Core Facilities Equipment Showcase: J.A. Woollam M2000 Spectroscopic Ellipsometer

    Arizona State University ResearchWatch on YouTube

What it is

The J.A. Woollam M-2000 is an ellipsometer used in metrology and inspection.[2]

How it works

General reference — not yet source-verified

An ellipsometer directs polarized light at a sample and measures the change in the reflected or transmitted polarization state.

The measurement response is used to infer film thickness and optical properties in layered materials.

Where it fits in the process flow

General reference — not yet source-verified

The instrument is used after deposition or other film-forming steps to verify film properties before further processing or final evaluation.

Applications

The J.A. Woollam M-2000 is used for thin-film metrology in fabrication environments.[2]

  • Thin-film characterization
  • Complex multilayer stacks
  • Transparent films
  • Advanced material research

What do the numbers mean?

Performance1

Data acquisition
High-speed, high-accuracy[1]
Accurate?

Configuration & options8

Equipment type
Spectroscopic ellipsometer[1]
Accurate?
Location
SEEL 168 Bay 1[1]
Accurate?
Designed for
Precise characterization of thin films[1]
Accurate?
Measures
Thickness, refractive index, and extinction coefficient[1]
Accurate?
Spectral range
UV to near-infrared[1]
Accurate?
Measurement technology
Rotating compensator technology[1]
Accurate?
Measurement type
Thickness, refractive index, extinction coefficient[1]
Accurate?
Technology
Rotating compensator[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What class of instrument is the J.A. Woollam M-2000?

The J.A. Woollam M-2000 is an ellipsometer.[2]

Where is the J.A. Woollam M-2000 placed in the facility workflow?

The J.A. Woollam M-2000 is part of the characterization tool set in the fabrication environment.[2]

Not publicly documented

The following facts about the M-2000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the M-2000 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the M-2000 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the M-2000 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the M-2000 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the M-2000 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]colorado.edu — colorado.educolorado.edu
  2. [2]Resource Scheduler & Rates | Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC) | University of Colorado Boulder — colorado.educolorado.edu
  3. [3]Resource Scheduler & Rates | Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC) | University of Colorado Boulder — colorado.educolorado.edu
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Last updated Oct 4, 2026.

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